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Material systems for dielectrics and metal electrodes 发明申请

2023-09-02 3270 1237K 0

专利信息

申请日期 2025-07-08 申请号 US11170341
公开(公告)号 US20070001231A1 公开(公告)日 2007-01-04
公开国别 US 申请人省市代码 全国
申请人 Matthew T Currie
简介 A structure having a dielectric layer that includes a dielectric material comprising a first metal nitride, and an electrode layer disposed over the dielectric layer, the electrode layer comprising a second metal nitride, with the first metal nitride and the second metal nitride having at least one metal in common. Alternatively, structure has a dielectric layer including a dielectric material comprising a metal oxide, and an electrode layer disposed over the dielectric layer, the electrode layer comprising a metal nitride. The metal oxide and the metal nitride each comprise at least one of a rare earth metal, a group IIIA metal, an alkali metal, an alkaline earth metal, and a transition metal, and the metal oxide and the metal nitride comprise the same metal. An interfacial layer may be disposed under the dielectric layer.


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