申请日期 | 2025-07-07 | 申请号 | US10568611 |
公开(公告)号 | US20060275545A1 | 公开(公告)日 | 2006-12-07 |
公开国别 | US | 申请人省市代码 | 全国 |
申请人 | Atsuya YOSHINAKA; Hiroki Sato; Ryusaku Fujimoto | ||
简介 | A tris(sec-butylcyclopentadienyl) complex of a rare earth metal represented by general formula (I). The complex is excellent in heat resistance and volatility and is liquid, which is advantageous for use as a thin film forming material. wherein M is a rare earth metal atom. |
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