| 简介 |
PROBLEM TO BE SOLVED : To provide an electrode for a dry etching device in which a plasma-proof capability is high enough and which has a long lifetime.
SOLUTION : A molded body having a through hole constitutes a part or all of the front surface of a conductive aluminum nitride obtained by making a rare earth nitride in an aluminum nitride grain boundary, by sintering a green object including 100 pts.mass of aluminum nitride powder and 0.5-20 pts.mass of a rare earth oxide in a reducing atmosphere. The molded body is used as an electrode for a dry etching device.
COPYRIGHT : (C)2007, JPO&INPIT |
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