| 简介 |
PROBLEM TO BE SOLVED : To provide a ceramic member excellent in reaction resistance and a high temperature reactor.
SOLUTION : The ceramic member excellent in reaction resistance is characterized in that it essentially consists of a silicon nitride phase, a second phase and an SiC particle phase, in that the total of the second phase and the SiC particle phase is 2 mass% or lower, in that the second phase is a solid solution of 0.5-1.3 mass% rare earth oxide and 0.5-1.3 mass% polytype of aluminum oxynitride, in that the ratio of the shape having an aspect ratio of 5 or more in the second phase is 10% or less, in that the ratio of the shape having a maximum diameter of the minor axis side of 0.8 μm or wider in the second phase is 30% or less, and in that the SiC particle phase has an average particle size of 0.05 μm or smaller and is composed of 0.2-0.4 mass% of spherical SiC fine particle. The high temperature reactor is obtained using the member.
COPYRIGHT : (C)2007, JPO&INPIT |
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