| 简介 |
The present invention relates to a solid-state laser comprising : a) a semiconductor pump laser, b) a lens integrated on the surface of said semiconductor pump laser, c) a packaging material consisting essentially of a spin-on glass material, wherein the spin-on glass material is processable at a process temperature of less than 225° C., and d) a lasing material layer having a highly reflective coating in both sides. The invention also relates to a process for producing such a solid-state laser, which process comprises applying spin-on glass material onto semiconductor wafers having VCSEL pump lasers using different coating methods, such as spin coating, and curing the glass film layer at temperatures <225° C.; printing desired patterning of the material by contact or proximity lithography methods and forming diffractive lens structures to shape the pump laser radiation into the lasing material which constitutes spin-on glass material doped with rare earth elements, such as erbium (Er) and ytterbium (Yb), or with semiconductor nano-particles or quantum dots. |
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