| 简介 |
PROBLEM TO BE SOLVED : To provide a method for depositing a vapor-deposited film of Al or an Al alloy on the surface of each work such as a rare earth based permanent magnet with excellent productivity while effectively suppressing the formation of projections and its damage.
SOLUTION : When, using a vapor deposition system where the inside of a vacuum treatment chamber is provided with a melting-evaporating part for a vapor deposition material and storing members for storing a plurality of works, while rotating the storing members stored with a plurality of the works with each axis of rotation in the horizontal direction as the center, the vapor deposition material of Al or an Al alloy is vapor-deposited on the surface of each work, the works are beforehand heated at 200 to 350°C, and then, the vapor deposition is started.
COPYRIGHT : (C)2007, JPO&INPIT |
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