| 简介 |
PROBLEM TO BE SOLVED : To provide a method of manufacturing a rare earth-containing metal oxide thin film useful, for example, for an ultraviolet-excited high efficiency fluorescent film or the like.
SOLUTION : The rare earth-containing metal oxide thin film is directly deposited on a substrate by a liquid phase deposition method (LPD method). A reaction solution in the LPD method is prepared by a method including a step for mixing a rare earth ion chelate complex with a metal fluoride complex. The rare earth-containing metal oxide thin film is deposited on the substrate using the LPD method by adding fluorine ion consumption agent into the reaction solution (selection figure (a)). The resultant thin film is heat-treated at a high temperature (selection figures (b)-(d)).
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