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METHOD OF FILM FORMATION, FILM FORMATION APPARATUS, PERMANENT MAGNET, AND PROCESS FOR PRODUCING P 发明申请

2023-10-30 2990 1798K 0

专利信息

申请日期 2025-06-25 申请号 WOJP06305034
公开(公告)号 WO2006100968A1 公开(公告)日 2006-09-28
公开国别 WO 申请人省市代码 全国
申请人 ULVAC INC; NAGATA Hiroshi; SHINGAKI Yoshinori
简介 A film is formed at a high rate on the surface of an iron-boron-rare-earth-metal magnet having a given shape, while effectively using dysprosium or terbium as a film-forming material. Thus, productivity is improved and a permanent magnet can be produced at low cost. A permanent magnet is produced through a film formation step in which a film of dysprosium is formed on the surface of an iron-boron-rare-earth-metal magnet of a given shape and a diffusion step in which the magnet coated is subjected to a heat treatment at a given temperature to cause the dysprosium deposited on the surface to diffuse into the grain boundary phase of the magnet. The film formation step comprises : a first step in which a treating chamber where this film formation is performed is heated to vaporize dysprosium which has been disposed in this treating chamber and thereby form a dysprosium vapor atmosphere having a given vapor pressure in the treating chamber; and a second step in which a magnet kept at a temperature lower than the internal temperature of the treating chamber is introduced into this treating chamber and the dysprosium is selectively deposited on the magnet surface based on a temperature difference between the treating chamber and the magnet until the magnet temperature reaches a given value.


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