| 简介 |
PROBLEM TO BE SOLVED : To provide a method and a device for producing high purity semiconductor particles at a high speed by effectively exhausting impurity components generated in the process of producing semiconductor particles by a melt dropping method.
SOLUTION : At least either a stage where a semiconductor material is heated and melted and a stage where a semiconductor melt is dropped into a vapor phase is performed while, inside a crucible or inside a jacket stored with the crucible, rare gas is fed from one side and is exhausted from the other side in succession.
COPYRIGHT : (C)2006, JPO&NCIPI |
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