申请日期 | 2025-07-09 | 申请号 | KR1020067002699 |
公开(公告)号 | KR1020060058710A | 公开(公告)日 | 2006-05-30 |
公开国别 | KR | 申请人省市代码 | 全国 |
申请人 | ADEKA CORPORATION | ||
简介 | A rare earth metal complex which is a tris-s-butylcyclopentadienyl/rare earth metal complex represented by the following general formula (I). It is a liquid rare earth metal complex excellent in heat resistance and volatility and suitable for use as a material for thin-film formation. (In the formula, M represents a rare earth metal.) © KIPO & WIPO 2007 |
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