| 申请日期 | 2025-06-25 | 申请号 | EP04771133 |
| 公开（公告）号 | EP1659130A1 | 公开（公告）日 | 2006-05-24 |
| 公开国别 | EP | 申请人省市代码 | 全国 |
| 申请人 | Asahi Denka Co Ltd | ||
| 简介 | A tris(sec-butylcyclopentadienyl) complex of a rare earth metal represented by general formula (I). The complex is excellent in heat resistance and volatility and is liquid, which is advantageous for use as a thin film forming material. wherein M is a rare earth metal atom. | ||
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