| 简介 |
PROBLEM TO BE SOLVED : To provide a surface treatment method for stably vapor depositing an easily oxidizable vapor deposition material such as aluminum on an article to be treated such as a rare earth based permanent magnet without taking a long time for obtaining high vacuum degree and without using a special device, to provide a surface treatment apparatus suitable for performing this method, and the like.
SOLUTION : In the surface treatment method for forming a vapor deposition film composed of the easily oxidizable vapor deposition material on the article to be treated, the vapor deposition material is vaporized in a state that a vapor deposition control gas is supplied at least to a melting and evaporating part and the vicinity of the article to be treated in a treating chamber.
COPYRIGHT : (C)2006, JPO&NCIPI |
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