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COMPLEX OXIDES FOR USE IN SEMICONDUCTOR DEVICES AND RELATED METHODS 检索报告

2023-03-20 1040 44K 0

专利信息

申请日期 2025-07-11 申请号 WOUS04018863
公开(公告)号 WO2005004198A3 公开(公告)日 2006-05-11
公开国别 WO 申请人省市代码 全国
申请人 NORTH CAROLINA STATE UNIVERSITY; THE PENNSYLVANIA STATE RESEARCH FOUNDATION; LUCOVSKY Gerald; SCHLOM Darrell
简介 A semiconductor device includes a semiconductor substrate, a first oxide layer on the semiconductor substrate including an element from the semiconductor substrate, and a second oxide layer on the first oxide layer opposite the semiconductor substrate. The second oxide layer includes a stoichiometric, single-phase complex oxide represented by the formula : AhBjOk, or equivalently (AmOn)a(BqOr)b in which the elemental oxide components, (AmOn) and (BqOr) are combined so that h = j or, equivalently, ma = bq, and a, b, h, j, k, m, n, q and r are non-zero integers; and wherein : A is an element of the lanthanide rare earth elements of the periodic table or the trivalent elements from cerium to lutetium; and B is an element of the transition metal elements of groups IIIB, IVB or VB of the periodic table.


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