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Process for refining nitrogen trifluoride gas using alkali earth metal impregnated zeolite 5A 发明授权

2022-12-24 3910 217K 0

专利信息

申请日期 2025-06-29 申请号 KR1020040053048
公开(公告)号 KR100577960B1 公开(公告)日 2006-05-02
公开国别 KR 申请人省市代码 全国
申请人 Tongyang Nylon Company; HYOSUNG CORPORATION
简介 The present invention refers to method relates to pyridinium methylcephem compound, 150 ∼ 600 °C than on-earth metal is impregnated in zeolite processing heating at a ∼ 100 ingredient 30 5A it buys the fire anger carbon the through a column a charging a (CF 4) pyridinium methylcephem containing (NF 3) by by venting of the gas, pyridinium methylcephem including the selectively adsorbed only pyridinium methylcephem compound relates to method, pyridinium methylcephem by the present invention from a gas the scavenging effect it buys the fire anger carbon method by using the mask pattern..


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