| 简介 |
PROBLEM TO BE SOLVED : To obtain the subject sintered compact with high corrosion resistance, suitable as a member for plasma treatment apparatuses capable of suppressing particle generation. SOLUTION : This high-density magnesium oxide-based sintered compact is such one as to consist mainly of magnesium oxide, contain 0.1-20 wt.%, on an oxide basis, of at least one kind of rare earth element selected from Yb, Er and Lu, contain =99% in relative density. Furthermore, in this sintered compact, there exists the rare earth metal(s) oxide crystal phase in the grain boundary phase. |
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