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METHOD FOR PRODUCING GROUP III NITRIDE SINGLE CRYSTAL AND APPARATUS USED THEREFOR 发明申请

2023-02-16 2060 488K 0

专利信息

申请日期 2025-07-21 申请号 EP04720698
公开(公告)号 EP1634980A1 公开(公告)日 2006-03-15
公开国别 EP 申请人省市代码 全国
申请人 Osaka Industrial Promotion Organization
简介 A production method is provided in which Group-III-element nitride single crystals that have a lower dislocation density and a uniform thickness and are transparent, high quality, large, and bulk crystals can be produced with a high yield. The method for producing Group-III-element nitride single crystals includes : heating a reaction vessel containing at least one metal element selected from the group consisting of an alkali metal and an alkaline-earth metal and at least one Group III element selected from the group consisting of gallium (Ga), aluminum (Al), and indium (In) to prepare a flux of the metal element; and feeding nitrogen-containing gas into the reaction vessel and thereby allowing the Group III element and nitrogen to react with each other in the flux to grow Group-III-element nitride single crystals, wherein the single crystals are grown, with the flux being stirred by rocking the reaction vessel, for instance.


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