| 简介 |
PURPOSE : A superconducting device and a manufacturing method are provided to improve a characteristic thereof by forming an YBCO high-temperature superconducting layer within the same chamber.
CONSTITUTION : A preparation process is performed to prepare a bi-oriented metal substrate(11). A hetero-epi SrTiO3 seed layer is deposited on an upper surface of the metal substrate by using a physical vacuum deposition method. A homo-epi SrTiO3 seed layer(12) is deposited on an upper surface of the hetero-epi SrTiO3 seed layer by using the physical vacuum deposition method. An epitaxy grown rare-earth-based high-temperature superconducting layer is formed by depositing a rare-earth-based high-temperature superconducting layer on the homo-epi SrTiO3 seed layer.
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