| 简介 |
PURPOSE : A process for refining nitrogen trifluoride gas using zeolite 4A ion-exchanged and impregnated with alkali earth metal is provided to selectively adsorb NF3 only from NF3 containing CF4 by ion-exchanging and impregnating zeolite 4A with a proper amount of alkali earth metal, and a nitrogen trifluoride adsorbent comprising the zeolite 4A ion-exchanged and impregnated with alkali earth metal used in the process is provided.
CONSTITUTION : A process for refining nitrogen trifluoride gas comprises a step of recovering pure nitrogen trifluoride after selectively adsorbing nitrogen fluoride only and ventilating carbon tetrafluoride by flowing nitrogen trifluoride(NF3) gas containing carbon tetrafluoride(CF4) through a column packed with zeolite 4A ion-exchanged and impregnated with alkali earth metal, wherein an amount of the ion-exchanged alkali earth metal is 20 to 95 wt.% of the total metal weight in zeolite, and an amount of the impregnated alkali earth metal is 0.1 to 5 wt.% of the total zeolite weight, wherein the alkali earth metal is magnesium(Mg), calcium(Ca), strontium(Sr) or barium(Ba), wherein the nitrogen trifluoride(NF3) gas containing carbon tetrafluoride(CF4) flows through a packing layer packed with an adsorbent at a temperature of -100 to 50 deg.C, wherein the nitrogen trifluoride(NF3) gas containing carbon tetrafluoride(CF4) flows through the packing layer along with 20 to 80 vol.% of an inert gas of argon, helium or nitrogen, and wherein adsorption and recovery of nitrogen trifluoride gas using zeolite 4A ion-exchanged and impregnated with alkali earth metal are repeatedly performed two or more times.
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