| 简介 |
PURPOSE : A process for refining nitrogen trifluoride gas using zeolite 3A ion-exchanged and/or impregnated with alkali earth metal is provided to selectively adsorb NF3 only from NF3 containing CF4 by ion-exchanging and/or impregnating zeolite 3A with a proper amount of alkali earth metal, and a nitrogen trifluoride adsorbent comprising the zeolite 3A ion-exchanged and/or impregnated with alkali earth metal used in the process is provided.
CONSTITUTION : A process for refining nitrogen trifluoride gas comprises a step of recovering pure nitrogen trifluoride after selectively adsorbing nitrogen fluoride only and ventilating carbon tetrafluoride by flowing nitrogen trifluoride(NF3) gas containing carbon tetrafluoride(CF4) through a column packed with zeolite 3A ion-exchanged and/or impregnated with alkali earth metal, wherein the zeolite 3A ion-exchanged with alkali earth metal is used, and an amount of the ion-exchanged alkali earth metal is 20 to 95 wt.% of the total metal weight in zeolite, wherein the zeolite 3A ion-exchanged and impregnated with alkali earth metal is used, and an amount of the ion-exchanged alkali earth metal is 20 to 95 wt.% of the total metal weight in zeolite, and an amount of the impregnated alkali earth metal is 0.1 to 5 wt.% of the total zeolite weight, wherein the alkali earth metal is magnesium(Mg), calcium(Ca), strontium(Sr) or barium(Ba), wherein the nitrogen trifluoride(NF3) gas containing carbon tetrafluoride(CF4) flows through the packing layer along with 20 to 80 vol.% of an inert gas of argon, helium or nitrogen, and wherein adsorption and recovery of the nitrogen trifluoride gas are repeatedly performed two or more times.
© KIPO 2006 |
客服热线：
手机版
二维码
