| 简介 |
PROBLEM TO BE SOLVED : To improve corrosion resistance to halogen-based corrosive gas or plasma and prevent occurrence of particles by specifying the chemical composition and the relative density of crystal consisting mainly of a titanic acid salt of an alkali earth metal. SOLUTION : A part exposed to a halogen-based corrosive gas or plasma is formed of a titanic acid salt sintered compact consisting mainly of AtiO3 type crystal (A is Mg, Ca, Si, Ba or the like) to provide the objective corrosion resistant member. The sintered compact has 1.005-1.998, preferably 1.05-1.90 ratio of a metal atom (A) to Ti atom (Ti) and <=0.5 wt.% (expressed in terms of oxide) total amount of Al and Si of a sintering auxiliary. A part of the component A is substituted with rare earth element or an oxide of the component A is added as a sintering auxiliary instead of Al2O3, SiO2, etc., so that the content of rare earth element in the sintered compact becomes <=10% (expressed in terms of oxide) to provide the objective compactized corrosion- resistant member having high corrosion resistance. |
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