| 简介 |
PROBLEM TO BE SOLVED : To provide a metallic thin film (an Ag-based thin film) low in electric resistance and also superior in coagulation resistance, a transparent electric conductor and an Ag-based reflective film superior in resistance to sulfurization and in coagulation resistance.
SOLUTION : (1) An Ag-based two-layer film has an Ag thin film as a first layer and an Ag alloy film containing at least one of noble metal elements, i.e. Au, Pd and Pt, as a second layer formed on the first layer. When the film thickness of the Ag alloy film is represented by Y(nm), the content of the noble metal element in the Ag alloy film is represented by X (at%) and the thickness of the Ag thin film is represented by Z(nm), Y≥8/X and Y+Z≥5 are satisfied. (2) The transparent electric conductor comprises a transparent film formed on a transparent substrate, the Ag-based two-layer film formed thereon and a transparent film formed on the above two-layer film. (3) The X in the Ag-based two-layer film is at least 25 at% and Y is at least 8 nm, and also each of the Ag thin film and the Ag alloy film contains a rare earth element of 0.05-3.0 at%.
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