| 申请日期 | 2026-04-26 | 申请号 | KR1020007003936 |
| 公开（公告）号 | KR100541300B1 | 公开（公告）日 | 2005-12-29 |
| 公开国别 | KR | 申请人省市代码 | 全国 |
| 申请人 | AIR PRODUCTS AND CHEMICALS INC | ||
| 简介 | An aqueous stripping composition comprising a mixture of a polar amine, an organic or inorganic amine and a corrosion inhibitor which is gallic acid, its ester or analog. The stripping composition is effective to strip photoresists, residues from plasma process generated organic, metal-organic materials, inorganic salts, oxides, hydroxides or complexes in combination with or exclusive of organic photoresist films at low temperatures without redepositing any substantial amount of metal ions. | ||
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