| 简介 |
PURPOSE : A rigid thin film for cutting/wear resistant tools having superior oxidation resistance at high temperature compared to a conventional TiAlN tool by adding La that is a rare earth element to TiAlN thin film, thereby reducing surface diffusion of Al from a matrix thin film and maintaining high hardness, and a method for manufacturing the same are provided. CONSTITUTION : The rigid thin film for cutting/wear resistant tools having oxidation resistance at high temperature is characterized in that it is represented as the following formula : TiaAlbLacNd, where 20<=a<=45 at.%, 5<=b<=25 at.%, 0.1<=c<=5 at.%, and 40<=d<=60 at.%. The method for manufacturing rigid thin film for cutting/wear resistant tools having oxidation resistance and high hardness at high temperature is characterized in that a TiAlLaN thin film is formed on the surface of tool steel by physical vapor deposition, and 0.1 to 5 at.% of La is added to a composition for the TiAlLaN thin film to reduce oxidation speed and improve thermal shock resistance, wherein 20 to 45 at.% of Ti, 5 to 25 at.% of Al and 40 to 60 at.% of N are contained in the TiAlLaN thin film, wherein a (Ti, Al) target containing La used in physical vapor deposition of the TiAlLaN thin film is formed by inserting metal La into the holes after forming a plurality of holes having a certain diameter on a (Ti, Al) target, and wherein the physical vapor deposition is applied using ion plating, sputtering, chemical vapor deposition, evaporation or a mixture thereof. |
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