| 简介 |
To obtain a high irradiation efficiency and intensity stability for extending the lifetime of the short-arc discharge lamp (20) to be used for IC exposure apparatus or the like, mercury and rare gases are sealed in the inner space (21) of the discharge tube (1). The rare gases are a mixture of a relatively high molecular weight rare gases such as xenon, krypton, argon, etc. and 5%∼40% by volume of a relatively low molecular weight rare gas such as helium, neon, etc. The pressure of the mixed rare gases is set to twice atmospheric pressure or higher. The anode (3) comprises a columnar body portion (14), a tapered portion (13) and a flat portion (12). |
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