| 简介 |
PROBLEM TO BE SOLVED : To provide a method for manufacturing efficiently a group III element nitride, e.g. gallium nitride or aluminum nitride, with high quality.
SOLUTION : A group III element such as gallium or aluminum and an alkali metal such as sodium are put into a crucible in a nitrogen gas atmosphere and thermally melted under pressure, thus growing a single crystal. The crucible used here is (A) one made of a nitrogen-free material having a melting point or decomposition temperature of 2, 100°C or higher or (B) one made of at least one material selected from the group consisting of rare earth oxides, alkaline earth metal oxides, W, SiC, diamond, and diamond-like carbon, this material preferably being, for example, Y2O3. The above yielded single crystal, as illustrated with a photograph (A) of the figure, is colorless and transparent and has a high quality and a maximum diameter of 2 cm or more. |
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