| 简介 |
Disclosed is a corrosion-resistant material capable of withstanding attack of a halogen-containing corrosive gas such as sulfur hexafluoride or a plasma thereof. The corrosion-resistant material is characterized in that at least the surface layer thereof is formed from a sintered body of a composite oxide having a crystalline structure of garnet and having a composition expressed by the formula Ln3Al5O12, in which Ln is a rare earth element or a combination of rare earth elements selected from the group consisting of dysprosium, holmium, erbium, thulium, ytterbium and lutetium, the material having a surface roughness Ra not exceeding 1 mu m and the sintered body having a porosity not exceeding 3%. |
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