| 简介 |
PROBLEM TO BE SOLVED : To provide a rare gas excimer laser device which can practically be used by eliminating the defects of electron beam excitation method, discharge excitation method and conventional laser excitation method. SOLUTION : Electrons 7 in a laser chamber 1 (electrons existing along a resonance optical axis 24) is irradiated with electromagnetic waves for excitation (microwaves, millimeter waves, etc., including laser light) or laser light La for excitation and are accelerated at a high speed by the energy thereof. As a result, the electrons 7 and a laser medium (rare gas) 22 in the laser chamber 1 callide with each other, and the rare gas is excited through three-body collision, and then rare gas excimer is generated and is oscillated and outputted as a rare gas excimer laser light Lb via an optical resonator 8. |
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