| 简介 |
PROBLEM TO BE SOLVED : To obtain a sintered body having high thermal conductivity, high strength, and high reliability by producing an aluminum nitride sintered body containing at least one kind of element selected from 3a elements in such a manner that white dots of a specified size are present in a specified amt. on the surface of the sintered body. SOLUTION : This aluminum nitride sintered body contains at least one kind of element selected from 3a group elements such as Sc, Y, rare earth elements (Ce, Dy, Yb, etc.) as a sintering assistant by 1 to 10wt.% calculated as oxide to the aluminum nitride source powder. As for the sintering assistant, an oxide or a substance which can be changed into an oxide by sintering is used as the source material. The sintering conditions for the aluminum nitride sintered body are controlled to a specified ranges to produce white dots on the surface of the sintered body. When white dots of 30 to 300μm average particle size are present by on the surface, a high strength sintered body can be obtd. The obtd. aluminum nitride sintered body has >=500MPa three-point bending strength at room temp. and >=95% relative density. |
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