| 简介 |
PROBLEM TO BE SOLVED : To obtain an abrasive particle powder maintaining a sufficient polishing rate and having an excellent polished surface and improving washing properties of the abrasive particle powder remaining after polishing in polishing using a cerium-based abrasive particle powder. SOLUTION : This abrasive particle powder comprises a cerium-based abrasive particle powder containing a cerium oxide in an amount of 30-80 wt.% based on rare earth oxides and satisfies the following formulae (1) and (2) when 10%, 50% and 90% particle diameters (μm) from the small particle diameter side are d10, d50 and d90 respectively in cumulative particle size distribution of particle size distribution measurement of the particle powder. 0.1<=d50<=3 (1) d90/d10<=15 (2). |
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