| 简介 |
PROBLEM TO BE SOLVED : To obtain a low thermally expandable ceramic having both a low thermal expansion and high rigidity and to provide a method for producing the ceramic. SOLUTION : A molded article obtained by compounding 80-92 wt.% of cordierite with 8-20 wt.% of an oxide of rare earth element (RE) is baked in vacuum at 1, 300-1, 500 deg.C, cooled at 10 deg.C/min cooling rate to 1, 000 deg.C to give a low thermally expandable ceramic comprising cordierite as a main phase and a crystal phase of the formula RE2 O3 .2SiO2 precipitated on the boundary, having / deg.C coefficient of thermal expansion and >=120 GPa Young modulus at >=95% relative humidity at 10-40 deg.C, suitable for especially a part of semiconductor producing apparatus such as a stage for an exposure device, etc. |
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