客服热线:18202992950

The sprayed coating and spraying powder. 发明授权

2023-07-20 2290 90K 0

专利信息

申请日期 2025-07-12 申请号 JP2001064249
公开(公告)号 JP3672833B2 公开(公告)日 2005-07-20
公开国别 JP 申请人省市代码 全国
申请人 SHINETSU CHEMICAL CO
简介 PROBLEM TO BE SOLVED : To provide a thermal-spraying powder excellent in fluidity and fusibility when the powder is supplied, and further, to provide a thermal-sprayed film excellent in the corrosion resistance to halogenated gas, such as fluorinated or chlorinated gases, or this plasma, by using the thermal-spraying powder. SOLUTION : This thermal-spraying powder is composed of compounds of one or more kinds of elements selected from the 3A group in the periodical table of elements and includes <=5 ppm iron group metallic compound expressed in terms of the oxide. As the compound of these elements, rare earth metal oxides are exemplified. The above oxides are desirable to be composite oxides with at least one kind or more of elements selected among Al, Si and Zr. The thermal-spraying powder is desirable to have 5-80 μm average grain diameter, 0.1-0.7 dispersion index and 1-5 m2/g specific surface area. The thermal-sprayed film having the halogen plasma resistance and the thermal-sprayed film for semi-conductor are obtained by thermal-spraying the thermal-spraying powder.


您还没有登录,请登录后查看下载地址


反对 0举报 0 收藏 0 打赏 0评论 0
下载排行
网站首页  |  关于我们  |  联系方式  |  使用协议  |  版权隐私  |  网站地图  |  排名推广  |  广告服务  |  积分换礼  |  网站留言  |  RSS订阅  |  违规举报  |  京ICP备2021025988号-4