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HARD CARBON FILM, AND METHOD FOR MANUFACTURING THE SAME 发明申请

2023-11-26 1490 36K 0

专利信息

申请日期 2025-06-27 申请号 JP2003400982
公开(公告)号 JP2005163071A 公开(公告)日 2005-06-23
公开国别 JP 申请人省市代码 全国
申请人 NISSAN MOTOR
简介 PROBLEM TO BE SOLVED : To provide a hard carbon film showing a friction coefficient as low as ≤0.04 in lubricating oil, and a method for manufacturing the same. SOLUTION : In order to increase the ratio of dangling bonds present on the surface, a hard carbon film is irradiated with rare gas plasma after or during film deposition on a substrate, and subjected to sliding motion mainly under lubricating oil. The substrate is preferably maintained at a temperature of ≤150°C.


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