| 简介 |
PROBLEM TO BE SOLVED : To reduce roughness of the surface of a core to which a rare-earth element is added in manufacture of an optical waveguide.
SOLUTION : A substrate 12 is etched by using as a mask a resist pattern provided on the substrate 12 to form a groove 13 on the surface of the substrate 1. A core material 15 to which the rare-earth element is added is deposited on the surface of the resist pattern 30 and of the groove 13. Consequently, the groove 13 is filled with the core material to form the core 14. The resist pattern 30 is removed from the substrate 12 together with the core material deposited on the resist pattern 30. The core 14 is formed without etching the core material to which the rare-earth element is added. Thus, roughness of the surface of the core 14 can be reduced. |
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