| 简介 |
PROBLEM TO BE SOLVED : To provide a manufacturing method of an aluminum nitride powder capable of continuously manufacturing a high purity aluminum nitride powder easily.
SOLUTION : This is a manufacturing method of an aluminum nitride by nitriding molten aluminum while atomizing and vaporizing it in a furnace. In this case, the furnace comprises a vaporizing zone over the inlet of nitrogen gas as the border, and a nitriding zone below it, and it is favorable that the furnace is a vertical reaction furnace with the temperature in the vaporizing zone of 2, 000-2, 500°C and that in the nitriding zone of 1, 400-2, 200°C. It is favorable that the molten aluminum is atomized with a rare gas injected so that the ratio of the nitrogen gas in the nitriding zone will be 80-95 vol%, and a shutoff gas is supplied from the vaporizing zone whirling along the inner wall of the furnace so that the ratio of the nitrogen gas in the nitriding zone will be 80-95 vol%. |
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