| 申请日期 | 2025-06-28 | 申请号 | US10986216 |
| 公开（公告）号 | US20050123288A1 | 公开（公告）日 | 2005-06-09 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | Yasutaka Ito; Jun Ohashi | ||
| 简介 | A gas injection head which is configured to jet a reactive gas includes a head surface. The gas injection head includes a nitride ceramic containing a rare earth compound which is present on the head surface. | ||
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