| 简介 |
PROBLEM TO BE SOLVED : To improve the abrasion resistance and corrosion resistance having excellent bonding properties onto magnet underneath by forming an Al film in a specific film thickness on a Ti film after the formation of the Ti film in a specific thickness by thin film forming method on the surface of an R-Fe-B base permanent magnet body furthermore forming a TiN film on the Al film. SOLUTION : The surface of an R-Fe-B base magnetic body having main phase which is tetragonal phase is cleaned up by a surface sputtering step using Ar ions. Next, Ti as a target is evaporated to form a Ti film layer in 0.1-3.0μm film thickness on a magnet body surface by arc ion plating process. Next, Al as another target is evaporated to form an Al film layer in 1μm-5μm film thickness on the Ti film layer also by arc ion plating process. Successively, Ti as the target is used to form TiN film layer in 0.5μm-10μm film thickness on the Al film layer. At this time, R represents a rare earth element. |
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