| 申请日期 | 2025-07-24 | 申请号 | US10416470 |
| 公开（公告）号 | US6893477B2 | 公开（公告）日 | 2005-05-17 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | Yoshitsugu Uchino; Kazuya Ushiyama | ||
| 简介 | The present invention provides a cerium-based abrasive slurry particles including a cerium-based abrasive particle of no less than 95% by weight of total rare earth oxides (TREO), in which the cerium-based abrasive particle has less than 3% by weight of fluorine content of TREO, and a particle size distribution determined by a laser diffraction method is within a predetermined range. And adhesion property is further improved by setting this fluorine content in 0.005 to 0.5% by weight of TREO. | ||
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