| 简介 |
The present invention provides a nitrogen oxide gas sensor based on sulfur-doped graphene and a preparation method therefor. The method comprises the following steps : 1) providing graphene and a micro heater platform substrate, and transferring the graphene onto the micro heater platform substrate; 2) putting the micro heater platform substratecovered with the graphene into a chemical vapor deposition reaction furnace; 3) performing gas feeding and exhausting treatment to the reaction furnace by using inert gas; 4) simultaneously feeding inert gas and hydrogen gas into the reaction furnace at a first temperature; 5) feeding inert gas, hydrogen gas and sulfur source gas into the reaction furnace at a second temperature for reaction to perform sulfur doping to the graphene (21); and 6) stopping feeding the sulfur source gas, and performing cooling in a hydrogen gas and insert gas shielding atmosphere. The preparation method provided by the present invention may adopt a wafer level substrate, which can realize wafer level preparation, can achieve the level of batch preparation and can greatly reduce the production cost; and the prepared gas sensor has relatively high sensitivity and selectivity to nitrogen oxide gas molecules. |
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