| 简介 |
PROBLEM TO BE SOLVED : To provide a gas supply method and apparatus, whereby a rare gas (e.g. krypton, xenon, or neon) in an exhaust gas exhausted from a facility for mixing and using the rare gas and an inert gas (e.g. argon or helium) is efficiently recovered and supplied as a gas mixture having a desired composition to the facility.
SOLUTION : The gas supply method comprises the following : into a vacuum exhaust means of a gas mixture-using facility for using a gas mixture of a rare gas (e.g. xenon, krypton, or neon) and an inert gas (e.g. helium or argon), an inert gas the same as that in the gas mixture is introduced as a seal gas; an exhaust gas from the vacuum exhaust means is introduced into a storage tank; a part of the exhaust gas in the storage tank is supplied as a gas mixture to the gas mixture-using facility; and the residue of the exhaust gas in the storage tank is introduced into a pressure-swing adsorption and separation means filled with an adsorbent hardly adsorbing the inert gas to thereby separate the inert gas and exhaust it out of the system. |
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