| 简介 |
PROBLEM TO BE SOLVED : To provide a thermal-spraying powder excellent in fluidity and fusibleness at supplying time and further, a thermal-sprayed film excellent in corrosion resistance to a halide gas, such as fluorine-base or chlorine-base, or its plasma by using this thermal-spraying powder.
SOLUTION : The thermal-spraying powder comprises a compound of one or more elements selected from group 3A elements in the periodic table and has ≤5 ppm conversion into the oxide in iron group metallic compounds. As the compounds of the element, a rare earth metal oxide is given as a example. The oxide is preferably a multicomponent oxide of the above rare earth metal and one or more elements selected from Al, Si and Zr and the thermal-spraying powder preferably has average grain diameter of 5-80 μm. The corrosion resistant thermal-sprayed film, especially the thermal-sprayed film having halide-plasma resistance, is obtained by spraying the thermal-spraying powder, and the thermal-sprayed film for semiconductor producing apparatus, is obtained. |
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