| 简介 |
PROBLEM TO BE SOLVED : To provide an electrostatic chuck wherein an insulating film on an electrode for attraction is not broken dielectrically and of which the response characteristics of attraction and releasing is superior.
SOLUTION : An electrode 4 for attraction is provided on one main surface of a glass substrate 3, and an insulating film 2 whose upper surface is an attraction plane to place a wafer is provided on the electrode 4 for attraction. The insulating film 2 is made of a uniform amorphous ceramic containing aluminum oxide, silicon oxide, yttrium oxide, yttrium aluminum oxide, or oxide of rare-earth element, or aluminum nitride, silicon nitride. |
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