| 简介 |
PROBLEM TO BE SOLVED : To provide a composition modulation type laminate composed of a ferroelectric and an insulator, and to provide a manufacturing method for the laminate.
SOLUTION : In the manufacturing method for the laminate composed of a ferroelectric thin-film and an insulator thin-film, the ferroelectric composed of a manganate containing yttrium or rare earth or its solid solution is synthesized on a semiconductor substrate by the insulator composed of an yttrium oxide, a rare earth oxide or its solid solution. The composition modulation type laminate is manufactured by the method. The composition modulation type laminate, in which the matching of the dielectric constants and lattice constants of the ferroelectric and the insulator is optimized by controlling the dielectric constants and the lattice constants, the orientational properties of the thin-films can be controlled and a voltage applied to the ferroelectric can be increased, can be manufactured. |
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