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RARE-EARTH METAL COMPLEX, RAW MATERIAL FOR FORMING THIN FILM, AND METHOD FOR PRODUCING THIN FILM 发明申请

2023-06-07 4030 105K 0

专利信息

申请日期 2025-08-04 申请号 JP2003299736
公开(公告)号 JP2005068074A 公开(公告)日 2005-03-17
公开国别 JP 申请人省市代码 全国
申请人 ASAHI DENKA KOGYO KK
简介 PROBLEM TO BE SOLVED : To provide a liquid rare-earth metal complex having excellent heat resistance and volatility, and suitable as a raw material for forming a thin film; and further to provide the raw material for forming the thin film, containing the rare-earth metal complex, and a method for producing the thin film by using the raw material for forming the thin film. SOLUTION : The tris(sec-butylcyclopentadienyl) complex of a rare earth metal represented by general formula (I) is provided.


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