文件类型:PDF文档
文件大小:273K
PROBLEM TO BE SOLVED : To provide a gas sensor capable of detecting inorganic gas such as hydrogen gas with high sensitivity in room temperature/low power consumption operation, and separately detecting inorganic gas such as hydrogen gas and organic gas.
SOLUTION : A gas sensor 10 includes a laminated structure comprising a semiconductor nanowire aggregate layer 2, a catalytic metal thin film layer 3 abutting one surface of the semiconductor nanowire aggregate layer 2, and an insulating thin film layer 4 disposed in the described order between a pair of opposing electrodes 1A, 1B.
SELECTED DRAWING : Figure 1
COPYRIGHT : (C)2019, JPO&INPIT