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Gas sensor

2025-06-21 05:253600下载
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PROBLEM TO BE SOLVED : To provide a gas sensor capable of detecting inorganic gas such as hydrogen gas with high sensitivity in room temperature/low power consumption operation, and separately detecting inorganic gas such as hydrogen gas and organic gas. SOLUTION : A gas sensor 10 includes a laminated structure comprising a semiconductor nanowire aggregate layer 2, a catalytic metal thin film layer 3 abutting one surface of the semiconductor nanowire aggregate layer 2, and an insulating thin film layer 4 disposed in the described order between a pair of opposing electrodes 1A, 1B. SELECTED DRAWING : Figure 1 COPYRIGHT : (C)2019, JPO&INPIT


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