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A method is provided for manufacturing a humidity sensing material. Particles of a trivalent rare earth hydroxide or oxide (such as lanthanum hydroxide) are mixed with particles of barium oxide and titanium dioxide in specified proportions. The particle mixture is heated to generate a sintered mixture that is milled. The resulting milled particles are mixed with glass particles, an organic surfactant, a solvent, an organic vehicle, and an alkali hydroxide. The resulting liquid mixture is deposited as a layer thereof onto a substrate. The substrate and layer thereon are processed to remove liquid portions of the liquid mixture. Such liquid removal processing includes at least one cycle of heating the layer followed by a corresponding cycle of cooling the layer in a nitrogen atmosphere containing less than 25 parts per million of oxygen.