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UV reflection film and sputtering target

2025-06-17 13:213970下载
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A UV reflective film having an 85% or higher UV reflectance at wavelength 254 nm is provided by controlling, to within prescribed ranges, the amounts of rare earth elements, Cu, and remaining Al that configure the UV reflective film, as well as the ratio of rare earth elements and Cu. This UV reflective film contains one of the following : 0.2-6.0 at% of Cu; and 0.2-3.0 at% of one or more types of rare earth elements, the remainder being Al and unavoidable impurities; the film also satisfies expression (1), below, and has an 85% or higher UV reflectance at wavelength 254nm. X + 0.5Y < 3.5... (1) [X is the amount [at%] of rare earth elements, and Y is the amount [at%] of Cu.]


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