具扩散阻障层及抗侵蚀层的多层涂层

文件类型：PDF文档
文件大小：3699K
A multi-layer coating for a surface of an article comprising a diffusion barrier layer and an erosion resistant layer. The diffusion barrier layer may be a nitride film including but not limited to TiNx, TaNx, Zr3N4, and TiZrxNy. The erosion resistant layer may be a rare oxide film including but not limited to YF3, Y2O3, Er2O3, Al2O3, ZrO2, ErAlxOy, YOxFy, YAlxOy, YZrxOyand YZrxAlyOz. The diffusion barrier layer and the erosion resistant layer may be deposited on the article’s surface using a thin film deposition technique including but not limited to, ALD, PVD, and CVD.