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This rare earth oxyfluoride sintered body has, as a main phase, LnaObFc (where Ln represents rare earth elements, and a, b, and c each independently represents a positive number and a=b=c is not true) or LnOF which is stabilized with Ca, and as a sub-phase, LnOF which is not stabilized with Ca. The ratio of the X-ray diffraction peak intensity of the (018) plane or (110) plane of the unstabilized LnOF to the strongest peak intensity of the X-ray diffraction peak of the LnaObFc is preferably 0.5% to 30%.