分享好友 知识库首页 频道列表

SPATTERING TARGET, METAL OXIDE PRODUCING METHOD, AND SPATTERING TARGET MANUFACTURING METHOD

2025-06-21 00:092000下载
文件类型：PDF文档
文件大小：141K
PROBLEM TO BE SOLVED : To provide a sputtering target containing a rare-earth element as an auxiliary component element of a minute amount, a method for producing a metal oxide containing a rare-earth element, and a sputtering target manufacturing method.SOLUTION : A sputtering target contains a metal oxide expressed by the following formula 1, and contains a rare earth element homogeneously dispersed. In A1-xRexTiyO3---(Eq. 1) (In Eq. 1 : A : at least one kind of alkaline earth metal element; Re : at least one kind of rare-earth element; Ti : titanium; O : oxygen, 0
反对 0
举报 0
收藏 0
打赏 0
评论 0