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Electrostatic chuck

2025-06-17 09:202380下载
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One embodiment of the present invention relates to an electrostatic chuck made of a nitride aluminum pellet, wherein the nitride aluminum pellet comprises : nitride aluminum; and a composite oxide formed in accordance with a grain of the nitride aluminum. The composite oxide comprises at least two types of rare earth metals having a mutual-employment relationship. The composite oxide has a collection area having higher oxygen content than the surroundings.COPYRIGHT KIPO 2017


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